Product features

The product range is specially adapted to applications in the semi conductor industry and ranges from compon-
ents like pressure regulators and valves up to complete panels, VMP‘s, VMB‘s and gas cabinets. Spectropur pro-
ducts are made from remelted stainless steel with electro-polished surfaces. The pressure regulators and valves
are built with Hastelloy diaphragms. The dead space optimised components are sealed metal to metal using the 
VCR technology. Patented purging devices secure the required gas purity.

Applications

Spectropur products can be used for a huge variety of applications as:
• Semiconductor production
• Research (R&D)
• Optical fibre technology
• Laser applications
• … and many other applications with the highest demands in therms of purity, particles, automation an safety.

Technical data

• Inlet pressure: max. 200 bar 
• Outlet pressure: 1,5 bar - 10 bar. 
• Max. flow: 100 Nm3/h. 
• Leak rate: 1 x 10-9 mbar.l/s

Applications

Spectrocem products can be used for a huge variety of pure gas applications in laboratory, chemical and pharmaceutical industry, R&D for:
• Calibration gases
• Process gases
• Semiconductor doping
• Laser applications
• … and many more applications